Presentation Information
[15p-PA3-4]Common-path phase-shifting interference microscope using a broadband light source (2)
Ryuichi Emoto1, 〇Jun Chen1, Mitsunori Toyoda1 (1.Tokyo Polytech. Univ.)
Keywords:
interference measurement,broadband light source
We have developed a transmitted common optical path phase-shift interferometric microscope using an incoherent broadband light source. In the system, the object light and the reference light pass through almost the same optical path, so it is almost unaffected by vibration and air fluctuations, and high-stability and high-precision phase measurement is possible. This system enables full-color microscopic observation with white light, greatly reduces noise caused by laser interference, and enables high-precision measurements.