Presentation Information
[15p-PB2-27]Molecular Dynamics Analysis of Chemical Mechanical Polishing of Polyimide
〇Ayumu Kamishita1, Shima Ishisaki1, Masaaki Yasuda2, Yoshihiko Hirai2, Kazuhiro Tada1 (1.NIT, Toyama Coll., 2.Osaka Metropolitan Univ.)
Keywords:
Chemical Mechanical Polishing,Molecular Dynamics