Presentation Information
[15p-PB2-31]A High-resolution Dispensing System for Ultra-fine Liquid Metal Wiring
〇Fumiya Kimura1, Nagatake Kyohei1, Endo Shuya1, Kuse Daisuke1, Takano Tamami1, Ota Hiroki1 (1.Yokohama Natl. Univ.)
Keywords:
Liquid metal,stretchable device,Fine wiring
In recent years, stretchable devices have been actively studied, and various patterning methods for liquid metals used as wiring materials have been investigated. In this study, a high-resolution dispensing system was developed for ultra-fine liquid metal wiring using a dispensing process. As a result, stable liquid metal wiring with an average line width of 1.56 µm was successfully fabricated using a nozzle with an inner diameter of 2 µm. Furthermore, needle-shaped wiring and three-dimensionally intersecting wiring structures were demonstrated, indicating the feasibility of fine three-dimensional wiring.