Presentation Information
[15p-PB2-69]Crystallinity and piezoelectric properties of c-axis-parallel-oriented ZnO films grown by sputtering with DC negative voltage applied to the substrate
〇Shinji Takayanagi1, Yuya Yoshida1, Keita Sakamoto1, Takahiko Yanagitani2 (1.Doshisha Univ., 2.Waseda Univ.)
Keywords:
piezoelectric thin film,sputtering deposition,thickness shear mode