[15p-W9_326-1~15] 7.1 X-ray technologies

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[15p-W9_326-1] Observations of tin plasmas for EUV light sources produced using double-pulse laser irradiation

〇Kentarou Tomita¹, Itsuki Shinoda¹, Yasushi Shirai¹ (1.Hokkaido Univ.)

Keywords:

EUV light source,electron temperature,electron density

In recent years, numerous attempts have been made to generate plasma for EUV light sources using multiple lasers. This presentation reports on the results of various types of observations of plasma behavior when two YAG lasers are irradiated to a solid Sn target coaxially. This observation was performed through measurements of spatial distribution and temporal variation of electron density and electron temperature, EUV emission imaging, and ion energy measurements using an ion energy analyzer.