Presentation Information
[15p-W9_326-9][The 47th Paper Award Speech] Towards Sub-10 nm Spatial Resolution by Tender X-ray Ptychographic Coherent Diffraction Imaging
〇Yukio Takahashi1,2, Nozomu Ishiguro1,2, Fusae Kaneko1,3, Masaki Abe1,2, Yuki Takayama1,2, Junya Yoshida1, Taiki Hoshino1,2, Shuntaro Takazawa1, Hideshi Uematsu1, Yuhei Sasaki1, Naru Okawa1, Keichi Takahashi4, Hiroyuki Takizawa4, Hiroyuki Kishimoto3 (1.SRIS, Tohoku Univ., 2.RIKEN SPring-8 Center, 3.Sumitomo Rubber Industries, Ltd., 4.CSC, Tohoku Univ.)
Keywords:
synchrotron radiation,X-ray ptychography
X-ray ptychography is a lensless imaging technique that reconstructs images by applying phase retrieval algorithms to coherent X-ray diffraction patterns, achieving spatial resolutions beyond the limitations of optical lenses. By using tender X-rays (between soft and hard X-rays), it enables high-sensitivity and high-resolution electron density mapping of light-element samples. At the NanoTerasu BL10U beamline, which offers much higher brightness than previous facilities, spatial resolutions better than 20 nm for tantalum test charts and below 50 nm for sulfur-containing polymer particles were achieved—representing world-class performance. The AOBA supercomputer at Tohoku University was used to optimize data processing during limited beamtime. Future developments, including focusing mirrors and detectors, aim for sub-10 nm resolution. Applications in semiconductor analysis are also being explored.