Presentation Information
[16a-PA5-10]Study on the fabrication process of Na2ZnSnS4 thin films using NaF evaporation and RF sputtering of precursors for Zn, Sn, S sintered target.
〇Kazuo Jimbo1, Yosuke Shimamune1 (1.NIT, Nagaoka College)
Keywords:
Thin film,Solar cell materials,Kesterite structure
The fabrication process was investigated, and compounds related to Na2ZnSnS4 were evaluated. Thin films were deposited on non-alkali glass substrates by RF sputtering using a sintered target containing Zn, Sn, and S components. Subsequently, a precursor layer was formed via NaF vapor deposition, followed by compound formation through a sulfidation process. EDS analysis revealed that the resulting films were Na-poor and S-poor compared with the stoichiometric composition. For the sample sulfurized at 748 K, an optical absorption edge in the range of 3.4–3.7 eV was observed from transmittance and reflectance measurements obtained using a spectrophotometer. Furthermore, several X-ray diffraction peaks attributable to Na2ZnSnS4 were detected.