Presentation Information

[16a-PA6-1]Growth and Characterization of Epitaxial CaTaAlO5 Thin Films by RF Magnetron Sputtering

〇(M1)Yuki Sunaoka1, Kenji Murakami1, Shintaro Yasui2, Hiroki Taniguchi3, Yoshitaka Ehara1 (1.NDA, 2.Science Tokyo, 3.Nagoya Univ.)

Keywords:

Sputtering,Titanite