[16a-PB6-1~5] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

[16a-PB6-5] Toward Photonics–Electronics Convergence Devices: Evaluation of Crystal Structure and Optical Absorption Properties of Si-Ion-Implanted Silicon

〇(M1C)Kosei Yamamoto¹, Keigo Uwasa¹, Sangmin Ji¹, Eiichi Kuramochi², Akihiko Shinya², Hideki Gotoh¹ (1.Hiroshima Univ., 2.NTT Basic Research Lab.)

Keywords:

Photonics-Electronics Convergence Devices