[16a-W9_325-1~7] 22.1 Joint Session M "Phonon Engineering"

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[16a-W9_325-5] Development of a measurement method for in-plane thermal diffusivity in thin films using a striped heating pattern (3): Measurement sensitivity on various substrates

〇Yuichiro Yamashita¹, Hiroto Arima¹, Takashi Yagi¹ (1.AIST)

Keywords:

in-plane thermal conductivity for thin film,time domain thermoreflectance method,heat transfer simulation

Time-domain thermoreflectance method with a striped pattern heating has been developed for measuring the in-plane thermal conductivity of thin film on the substrate. We revealed that Mo thin film on the quartz glass substrate have different thermal conductivity for in-plane and cross-plane directions. In this presentation, measurement capability and acceptable specification of specimen will be discussed through the measurement sensitivity analysis for various substrates.