[16a-W9_326-1~10] 3.12 Semiconductor optical devices

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16a-W9_326-4] AI-Based SEM Image Analysis for Evaluating Periodicity and Filling Factor in 2D Photonic Crystals of Surface-Emitting Quantum Cascade Lasers

〇Tetsuya Miyagawa¹, Tomoki Tsukada¹, Rei Hashimoto¹, Afshan Begum², Kazuaki Sakoda², Shinji Saito³ (1.Toshiba Corp., 2.NIMS, 3.Shonan Inst.)

Keywords:

Quantum Cascade Lasers,Photonic Crystals,SEM

In a surface-emitting quantum cascade laser incorporating a photonic crystal, we quantitatively evaluated deviations in shape and dimensions from the design values by extracting the InGaAs region through AI-based analysis of cross-sectional SEM images of the photonic crystal. This inference process not only enables rapid processing of large volumes of SEM observations for verifying photonic crystal periodicity, but also shortens the feedback cycle required to fabricate photonic crystals with shapes and dimensions conforming to the design specifications.