[16a-W9_327-1~6] 16.2 Energy Harvesting

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[16a-W9_327-2] Incorporation of Nickel Silicide in Multistage Silicon Micro Thermoelectric Devices

〇(B)Kaichi Takayama¹, Takuya Miura¹, Mai Awata¹, Tatsuya Hayashi¹, Kotaro Okuda¹, Yusuke Kozuka^1,2, Makoto Kashiwagi³, Takayoshi Shimura¹, Takanobu Watanabe¹ (1.Waseda Univ., 2.NIMS, 3.NTRC)

Keywords:

thermoelectric generation,semiconductor,seebeck effect