Presentation Information

[16a-W9_327-3]Devlopement of process technology for thermoelectric devices using Mg2Si Thin films

〇(B)Kotaro Okuda1, Awata Mai1, Hayashi Tatsuya1, Miura Takuya1, Takayama Kaichi1, Kozuka Yusuke1,3, Kashiwagi Makoto2, Shimura Takayoshi1, Watanabe Takanobu1 (1.Waseda Univ., 2.NTRC, 3.NIMS)

Keywords:

semiconductor,Mg