[16a-WL2_401-1~8] 6.2 Carbon-based thin films

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[16a-WL2_401-1] Deposition of DLC films on the inner wall of small diameter pipes using magnetic field-assisted plasma CVD

〇(M1)Ryo Sako¹, Hiroki Akasaka¹ (1.Science Tokyo)

Keywords:

DLC,Pipe,Magnet