Presentation Information

[16a-WL2_401-4]Investigation of Machine Learning Efficiency Enhancement through FFT-Based Analysis of Spectroscopic Data during DLC Deposition

〇Naoki Kashimura1, Akira Nakamura1, Takashi Komatsu1, Yoshiharu Ohgoe2 (1.Kanagawa Univ., 2.Tokyo Denki Univ.)

Keywords:

spectral,Diamond Like Carbon,plasma