[16p-M_135-1~14] 1.5 Instrumentation, measurement and Metrology

5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[16p-M_135-13] Trace Moisture Detection Using a Membrane-Type Surface Stress Sensor

〇Gaku Imamura^1,2, Masaaki Matoba¹, Yusuke Miki³, Kasumi Sanui³, Susumu Sakata³, Tomohiro Murata^2,4, Genki Yoshikawa^1,2 (1.Qception, 2.NIMS, 3.Taiyo Nippon Sanso, 4.Univ. of Tokyo)

Keywords:

gas sensor,moisture,DNA

Detecting trace moisture in gases is a critical technology in applications such as high-purity gas production and semiconductor processing. This study employed a membrane-type surface stress sensor (MSS) with a DNA-based receptor layer to detect trace moisture in gas samples. Measurements were performed with water concentrations of 10, 20, 50, and 100 ppm in nitrogen. Sensor response was obtained at each concentration. Assuming the sensor response intensity is linear with concentration, the limit of detection is estimated to be approximately 40 ppb.