[16p-PA5-1~4] 15.7 Crystal characterization, impurities and crystal defects

[16p-PA5-1] The role of hydrogen in hydrogen-related donor

〇AKIRA KIYOI¹, YUSUKE NISHIYA^2,3, YUICHIRO MATSUSHITA^2,3, TAKAHIDE UMEDA⁴ (1.Mitsubishi Electric Corp., 2.Univ. of Tokyo, 3.Quemix Inc., 4.Univ. of Tsukuba)

Keywords:

point defect,hydrogen

Although the device fabrication process involving hydrogen-related donors (complex defects containing hydrogen that act as shallow donors) has already been implemented in practical applications, their underlying mechanism has remained unclear. Our DFT calculations revealed that the donor behavior arises from the synergistic interaction between hydrogen and the I4 defect.