Presentation Information
[16p-PB1-7]In-situ Observation of Carbon Films Formed by Thermal CVD Using Synchrotron Radiation
〇Yuichi Haruyama1, Akira Heya2, Koji Sumitomo2, Seigo Ito2 (1.LASTI Univ. of Hyogo, 2.Univ. of Hyogo)
Keywords:
thermal CVD,photoelectron spectroscopy,carbon film
In order to investigate the effect of atomic hydrogen irradiation on DLC thin films, our group has installed an atomic hydrogen irradiation equipment in the end station of the beamline at the NewSUBARU Synchrotron Radiation Facility of the University of Hyogo, and has been evaluating the film using photoelectron spectroscopy and absorption spectroscopy without exposing it to the atmosphere. Here, we report that a carbon film was formed by introducing methane gas into the atomic hydrogen irradiation equipment, and that in-situ observation using synchrotron radiation photoelectron spectroscopy and absorption spectroscopy became possible.