Presentation Information
[16p-PB3-1]Optimization of fabrication methods for diamond nitrogen-vacancy pillar probes using a focused ion beam milling.
〇(M2)Akito Fukuoka1, Shunsuke Uesugi1, Kunitaka Hayashi1, Dwi Prananto1, Toshu An1 (1.JIST)
Keywords:
quantum sensing
NV centers in diamond exhibit long coherence times at room temperature, making them suitable for magnetic sensing applications. We developed a scanning NV probe microscope, but NV center loss and degradation during FIB processing remained a challenge.
In this study, we used a doughnut-shaped gallium ion beam to fabricate a pillar probe with a diameter of 0.31 μm under conditions of 5 keV irradiation energy, 43.95 pA current, and 1.0 μm processing diameter. The pillar shape and presence of NV centers were confirmed by SEM and ODMR.
In this study, we used a doughnut-shaped gallium ion beam to fabricate a pillar probe with a diameter of 0.31 μm under conditions of 5 keV irradiation energy, 43.95 pA current, and 1.0 μm processing diameter. The pillar shape and presence of NV centers were confirmed by SEM and ODMR.