[16p-PB4-1~39] 17 Nanocarbon and Two-Dimensional Materials (Poster)

[16p-PB4-20] High-Purity Semiconductor-Type Carbon Nanotubes with High Orientation Control

〇Toshie Miyamoto^1,2, Tomo Tanaka^1,2, Megumi Kanaori², Norika Fukuda², Noriyuki Tonouchi^1,2, Akinobu Shibuya^1,2, Ryota Yuge^1,2 (1.NEC, 2.AIST)

Keywords:

Carbon nanotube,Borometer

We investigated a film deposition method to achieve high alignment of semiconductor-type CNTs for low-resistance purposes. Fabrication and evaluation of a bolometer device using a semiconductor-type CNT film revealed a highly aligned CNT network oriented uniformly across the entire substrate surface. Furthermore, the substrate-wide distribution of electrical characteristics confirmed reduced variation in device performance.