[16p-W8E_308-1~8] 11.4 Analog applications and their related technologies

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[16p-W8E_308-5] Fabrication of superconducting tunnel junction on Silicon-On-Insulator wafer

〇Shigetomo Shiki¹, Go Fujii¹ (1.AIST)

Keywords:

superconducting detector,piexel absorber,Silicon-on-Insulator

The technology to fabricate superconducting tunnel junctions (STJ) on SOI substrates is expected to not only broaden the scope of X-ray detector manufacturing, but also to have extreme applications such as realizing monolithic devices combined with silicon integrated circuits. We attempted to fabricate a prototype STJ using an SOI substrate and succeeded for the first time. We report an overview of the prototype and its current-voltage characteristics.