[16p-W9_325-1~10] 11.2 Thin and thick superconducting films, coated conductors and film crystal growth

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[16p-W9_325-4] Fabrication of Superconducting YBa₂Cu₃O₇ Thin Films by Mist CVD and Post-annealing

〇(B)Naoya Shibata¹, Ryo Horiuchi¹, Akiyoshi Matsumoto², Takumi Ikenoue¹, Toshiya Doi¹ (1.Kyoto Univ., 2.NIMS)

Keywords:

YBCO,Mist CVD,REBCO

YBa₂Cu₃O₇ (YBCO), with its high critical temperature of 92 K, shows great promise for superconducting wire applications. However, establishing a low-cost, high-productivity fabrication process under atmospheric pressure remains a critical challenge. In this study, we employed the mist chemical vapor deposition (Mist CVD) method, which enables continuous film fabrication at atmospheric pressure. YBCO thin films were deposited by Mist CVD at 500°C and subsequently annealed at 755°C. The resulting films exhibited a critical current density of 380 kAcm^-2 at 10 K, demonstrating the potential of this approach for practical applications.