[16p-W9_325-1~10] 11.2 Thin and thick superconducting films, coated conductors and film crystal growth

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[16p-W9_325-7] Development of a Visual Feedback Control System for the PLD Thin Film Deposition Process

〇(M2)Tatsuma Hachiya^1,5, Syoya Nakao^1,5, Kosuke Kawabata^2,5, Yusuke Ichino^3,5, Ataru Ichinose^4,5, Tomoya Horide^2,5, Kaname Matsumoto^2,5, Yutaka Yoshida^2,5, Keiichi Horio^1,5 (1.Kyushu Inst., 2.Nagoya Univ., 3.Aichi Inst., 4.CRIEPI, 5.JST-CREST)

Keywords:

plume,machine learning,PLD method

We aim to stabilize the thin-film deposition process in the PLD method. Although the plume shape varies due to various conditions within the difficult-to-observe vacuum chamber, this study established a control system that achieves the desired plume shape by manipulating laser energy (LE) and oxygen partial pressure (OP) as control variables. Despite targeting a nonlinear process with response delays, stable shape control was achieved using only simple P control.