[16p-W9_326-1~11] 3.12 Semiconductor optical devices

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[16p-W9_326-3] A study on Mach-Zehnder Interferometers Based on Silicon Rib Waveguides

〇(M1)Kosuke Yonekura¹, Hiromasa Shimizu¹ (1.Tokyo Univ of Agri & Tech)

Keywords:

olfactory sensor,waveguide,rib

In recent years, the demand for olfactory sensors capable of quantitatively evaluating odorant molecules has been increasing. Silicon-based waveguide sensors are highly advantageous in terms of durability, device size, and integrability. We have previously reported the enhancement of sensitivity to sodium acetate at a concentration of 5 x 10^-4 mol/L using a silicon Mach-Zehnder interferometer (MZI) sensor with a sensing region length of 1.4 mm functionalized with the olfactory receptor OR51E2. In this study, with the aim of reducing propagation loss and improving sensitivity, we fabricated and evaluated a rib-type MZI waveguide with a sensing region length of 3 mm.