The 73rd JSAP Spring Meeting 2026
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Sun. Mar 15, 2026
Mon. Mar 16, 2026
Tue. Mar 17, 2026
Wed. Mar 18, 2026
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4:00 PM - 4:10 PM JST
(7:00 AM - 7:10 AM UTC)
[16p-WL1_401-10]
Development of Software Functions for AI Semiconductor Wafer Transfer
〇Shuji Sato
1
(1.Canon Optical Ops.)
Keywords:
AI semiconductor wafer,wafer transfer
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