[16p-WL1_401-1~12] (Public Symposium) Attention Job Seeking Students! Exploring the Fusion of AI and Semiconductors: Scientific Insights and Engineering Challenges

3:40 PM - 3:50 PM JST(6:40 AM - 6:50 AM UTC)

[16p-WL1_401-8] Designing Plasma — Challenging Equipment Optimization via Simulation Analysis

〇Seiya Kito¹ (1.KOKUSAI ELECTRIC)

Keywords:

plasma treatment,film property improvement