[16p-WL2_301-1~15] 3.8 Terahertz technologies

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[16p-WL2_301-12] Fabrication of Terahertz bandpass Filter using a Si₃N₄ membrane structure

〇Akira Kawakami¹, Yoshihisa Irimajiri¹, Shingo Saito¹, Norihiko Sekine¹, Yuji Hishida¹, Hirotaka Terai¹ (1.NICT)

Keywords:

bandpass filter,membrane structure

As a fundamental technology in the THz frequency range, we are conducting research and development of high-sensitivity, wide-IF-bandwidth superconducting hot electron bolometer mixers. As the performance of these mixers improves, a narrow-band bandpass filter (BPF) is needed to remove unwanted blackbody radiation. Therefore, we attempted to fabricate a THz-band BPF by introducing a membrane structure and microfabrication technology. The prototype BPF exhibited excellent characteristics, with a maximum transmittance of 88% and a relative bandwidth of approximately 11% at a center frequency of 2.01 THz, which coincided with the design frequency.