[16p-WL2_301-1~15] 3.8 Terahertz technologies

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[16p-WL2_301-14] Proposal of a Bendable Terahertz Silicon Waveguide Using Flexible Silicon

〇Hidemasa Yamane¹, Yoshiharu Yamada¹, Yusuke Kondo¹, Daiki Ichikawa², Weijie Gao², Nguyen Ngo², Masayuki Fujita², Shuichi Murakami¹ (1.ORIST, 2.Univ. of Osaka)

Keywords:

terahertz,silicon photonics,waveguide

Terahertz silicon photonics using high-resistivity silicon has attracted attention for low-loss devices, but its rigidity limits practical implementation. In this study, we propose a bendable terahertz silicon waveguide fabricated by MEMS micro-structuring with periodic spring and slit structures. Experimental results show that the waveguide maintains good transmission characteristics with negligible additional loss even under bending deformation.