[16p-WL2_301-1~15] 3.8 Terahertz technologies

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[16p-WL2_301-4] Evaluation method for silicon wafers using RTD compact imaging system

〇Eriko Umetsu¹, Norimasa Takahashi¹, Ryoichi Fukasawa¹ (1.Spectra Design Ltd.)

Keywords:

THz imaging,resonant tunneling diodes (RTD)