[17a-M_135-1~10] 1.3 Novel technologies and interdisciplinary engineering

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[17a-M_135-8] Fabrication Process of 3D Concave Mirrors for Silicon Optical Interconnects using a Anisotropic and Isotropic Etching

〇Tetsu Ohinata¹, Keto Kikuchi^1,2, Taro Itatani², Akihiro Noriki², Yoshinobu Okano¹, Takeru Amano² (1.Tokyo City Univ., 2.AIST)

Keywords:

silicon photonics,KOH wet etching,micro mirror

We fabricated samples using anisotropic KOH etching and isotropic dry etching of ICP-RIE, for realizing three-dimensional optical interconnection between Si-based optical waveguides suitable for high-density integration and polymer optical waveguides for flexible packaging.