Presentation Information
[17a-PA2-19]Development of Flexible Resistive Sensors Using WOx Thin Films by Sputtering
〇(M2)Fangzhu Meng1, Makito Inoue1, Shuo Li1, You Yin1 (1.Gunma Univ.)
Keywords:
Sensor,Flexible,WOx
In recent years, flexible resistive sensors have attracted significant attention for wearable and flexible electronic applications. However, the effects of deposition conditions and film thickness on resistance behavior under bending deformation have not been fully clarified. In this study, a lateral-type flexible resistive sensor using tungsten oxide (WOx) thin films was fabricated. The static bending characteristics were evaluated by systematically controlling the oxygen flow rate and film thickness. The results indicate that thinner films exhibit larger resistance changes, while thicker films show improved stability against repeated bending, demonstrating the importance of thickness optimization for flexible sensor design.