[17a-PA2-1~26] 6.4 Thin films and New materials

[17a-PA2-20] Synthesis and characterizations of zirconium oxynitride epitaxial thin films

〇(D)Daichi Miyazaki¹, Kohei Yoshimatsu¹, Akira Ohtomo¹ (1.Science Tokyo)

Keywords:

oxynitride,epitaxial thin film

Metal oxynitrides are anticipated for applications as visible-light-responsive photocatalysts for water splitting and as dielectric materials. However, the high stability of nitrogen molecules makes single-crystal growth difficult, hindering fundamental understanding of their physical properties. We are focusing on the zirconium oxynitride system (Zr_n+3O_2nN₄) including γ-Zr₂ON₂ (n = 1) reported to exhibit water-splitting photocatalytic activity, and report on single-crystal growth via epitaxial thin films and characterizations of their physical properties in the presentation.