Presentation Information
[17a-PA3-10]Effect of High-Temperature Activation of Oxygen-Free Pd/Ti-Deposited NEG in Vacuum Chambers Containing Hygroscopic Materials (PEEK)
〇Yu Kano1, Yusuke Masaoka1, Manabu Yabe1, Kenichi Hamanaka1, Ichiro Yoshikawa2, Kazuo Yoshioka2, Yiwei Guo2, Yusaku Sadakane2 (1.Irie Koken Co., Ltd., 2.Tokyo Univ.)
Keywords:
NEG,vacuum,thin film
This study experimentally quantifies the increase in ultimate pressure within a vacuum chamber containing PEEK (Polyether ether ketone) materials. Furthermore, it evaluates the extent to which the ultimate pressure can be reduced—and the duration for which this low-pressure state can be maintained—by employing overheated oxygen-free Pd/Ti-deposited non-evaporable getters (NEGLAZE) to evacuate residual gases such as water vapor. Based on these empirical results, the effectiveness of the NEG overheating process for vacuum transport applications is validated.