Presentation Information
[17a-PB1-30]Effect of TiO2 Layer Deposition Conditions on the J-VPhotovoltaic Conversion Characteristics of Cu2O/TiO2 Solar Cells
〇(M1)Riku Iizuka1, Ichiro Takano1 (1.Kogakuin Univ.)
Keywords:
solar cell,thin film,Sputtering
This study investigated the effect of TiO2 layer deposition conditions on the J-V characteristics of Cu2O/TiO2 solar cells. Samples were fabricated and evaluated by varying the TiO2 target input power, oxygen flow rate, and substrate heating temperature. Results showed that high short-circuit current density and photovoltaic conversion efficiency were achieved under conditions of 90 W input power and 1.5 sccm oxygen flow rate. Furthermore, increasing the oxygen flow rate enhanced the anatase phase of TiO2, confirming an improvement in open-circuit voltage due to a reduction in oxygen defects.