Presentation Information
[17a-PB1-6]In-plane electrical Conduction Properties of Titanium/Zinc Oxide Junction Interfaces Using Electric Double-Layer Transistor Structure
〇Momoka Shimokawa1, Ryosuke Ishiguro1 (1.Japan Women's Univ.)
Keywords:
Zinc Oxide,Electric Double-Layer,interface state
Zinc oxide (ZnO) is a promising semiconductor for FET applications; however, achieving low contact resistance and clarifying the interface states remain key issues. Previous research using Electric Double Layer Transistor (EDLT) structures suggested the existence of a unique 2D interface state that potentially exhibits superconductivity at the metal/ZnO junctions. This study aims to demonstrate the in-plane conduction of the interface state in Ti/ZnO junctions and verify its superconductivity. We report on the device structure, TLM evaluations, and in-plane transport properties via four-terminal measurements.