[17p-M_101-1~18] 17.2 Graphene

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[17p-M_101-3] Influence of the Substrate Temperature on Sputtering Deposition of Graphene onto an Insulator Substrate

〇Rion Kikuna^1,2, Takeo Nakano¹, Katsuhisa Murakami², Masayoshi Nagao², Hiromasa Murata² (1.Seikei Univ., 2.AIST)

Keywords:

Graphene,Sputtering