[17p-M_110-1~13] 3.4 Laser system and materials

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[17p-M_110-3] Investigation of Surface Figure, MPPL and LIDT of TiO2–SiO2 Nanolaminate Films

〇(B)Shu Mukai¹, Tomoaki Nambu¹, Takahisa Jitsuno^1,2, Shinji Motokoshi³, Tomoyuki Tanikawa⁴, Takuya Mikami⁵, Akifumi Yogo¹, Masashi Yoshimura¹ (1.ILE, The Univ. of Osaka., 2.ELI-NP., 3.Inst. for Laser Technology., 4.Grad. Sch. of Eng., The Univ. of Osaka., 5.OKAMOTO OPTICS, INC.)

Keywords:

optical element

In TiO2 single-layer films and TiSiOx nanolaminate films containing approximately 10% SiO2 fabricated by ALD, the nanolaminate films exhibited up to a 1.62-fold improvement in LIDT compared with the TiO2 single layer. MPPL measurements revealed pronounced emission and spatial inhomogeneity in the TiO2 single layer, corresponding to defect localization observed in AFM images. In contrast, the nanolaminate films showed suppressed emission and reduced surface roughness, suggesting that suppression of crystallization and columnar growth reduced defect states, thereby contributing to the enhanced LIDT.