[17p-M_278-1~16] 6.1 Ferroelectric thin films

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[17p-M_278-2] Fabrication and characterization of epitaxial perovskite-type nitride LaWN₃ thin films by RF sputtering

〇Tatsuya Masuda¹, Yosuke Hamasaki², Yoshitaka Ehara², Shintaro Yasui³, Mitsuru Itoh³, Takeharu Kato¹, Hiroki Moriwake^1,3 (1.JFCC, 2.NDA, 3.Science Tokyo)

Keywords:

RF sputtering,perovskite-type nitride,LaWN3