[17p-M_278-1~16] 6.1 Ferroelectric thin films

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-M_278-5] Film thickness dependence of double-layer epitaxial Pb(Zr,Ti)O₃ thin films

〇(M1)Ryunosuke Yagi¹, Naoto Yamamoto¹, Sang Hyo Kweon¹, Isaku Kanno¹ (1.Kobe Univ.)

Keywords:

PZT

In piezoelectric thin films, internal stress induced by substrate clamping affects thickness-dependent piezoelectric properties. In this study, epitaxial double-layer PZT thin films with different compositions were fabricated to evaluate the relationship between internal stress and crystal structure. XRD measurements revealed clear a-axis orientation in the double-layer films. The in-plane lattice constant significantly decreased at PZT(30/70) layer-thicknesses of 10–50 nm and became almost constant at larger thicknesses, indicating stress relaxation behavior.