Presentation Information

[17p-M_374-8]Challenges in the highly stacked generation of 3D flash memory, and horizontal channel flash memory as its countermeasure

〇Minoru Oda1 (1.Kioxia Corporation)

Keywords:

flash memory,horizontal channel flash

3D flash memory faces the problem of cell current degradation as the number of layers increases. We propose a new memory structure, horizontal channel flash (HCF), which has constant cell current even at high stacking layers. We also discuss its device characteristics and issues.