[17p-M_374-8]Challenges in the highly stacked generation of 3D flash memory, and horizontal channel flash memory as its countermeasure
〇Minoru Oda1 (1.Kioxia Corporation)
Keywords:
flash memory,horizontal channel flash
3D flash memory faces the problem of cell current degradation as the number of layers increases. We propose a new memory structure, horizontal channel flash (HCF), which has constant cell current even at high stacking layers. We also discuss its device characteristics and issues.
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