[17p-M_B07-1~10] Frontiers of Semiconductor Characterization Techniques

5:15 PM - 5:40 PM JST(8:15 AM - 8:40 AM UTC)

[17p-M_B07-10] Surface Analysis Using Ion Beam for Semiconductor Device

〇Junichiro Sameshima¹, Yoshihiko Nakata¹, Taichi Suda¹, Yumi Hayashi¹, Shino Kosaka¹, Masahiro Saito¹, Tetsuya Kogita¹, Takashi Yamamoto¹ (1.Toray Research Center)