[17p-S2_204-1~18] 23.1 Joint Session N "Informatics"

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[17p-S2_204-10] Acceleration of X-ray Photoelectron Spectroscopy Measurements by Spectral Super-resolution and Development of Analysis Software

〇Shunta Harada^1,2, Kota Tsujimori², Tatsuki Kodera², Shinichiro Kinoshita² (1.Nagoya Univ., 2.SSR)

Keywords:

XPS,spectroscopy,super-resolution

X-ray photoelectron spectroscopy (XPS) often requires fine energy steps and signal averaging, leading to long acquisition times, especially for depth profiling and mapping. We apply spectral super-resolution, a Bayesian framework extended from image super-resolution, to reconstruct a high-density spectrum from multiple coarsely sampled spectra acquired with small controlled energy shifts. For Si 2p on glass, reconstruction from 80 spectra measured at 0.4 eV/step achieved lower background noise than conventional 0.05 eV/step spectra with 10 accumulations for the same 40 min. Moreover, we demonstrate that comparable S/N can be maintained even with one-fifth of the total measurement time. We also present a GUI-based analysis software that guides users from data import to reconstruction, quality metrics, and export for routine XPS workflows.