[17p-S2_204-1~18] 23.1 Joint Session N "Informatics"

5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)

[17p-S2_204-16] Preliminary Application of Non-Rigid Registration to Three-Dimensional Atom Probe Data and STEM Tomography Data

〇Zentaro Akase¹, Taisei Bessho¹, Yuki Hino¹, Yugant Gotmare¹, Yoshito Otake¹, Jun Uzuhashi², Kazunori Iwamitsu¹, Hiroshi Nakajima³, Jun Yamasaki³, Tadakatsu Ohkubo², Shigetaka Tomiya¹ (1.NAIST, 2.NIMS, 3.UOsaka)

Keywords:

Atom Probe Tomography,Electron Tomography,trace element distribution analysis

To enable three-dimensional evaluation of trace impurities in advanced semiconductor devices, we are developing a correlative microscopy method that combines atom probe tomography (APT) and electron tomography (ET). We propose an improved non-rigid registration approach in which modality conversion is performed only at the initial stage, thereby enhancing registration stability near interfaces. The effectiveness of the method is demonstrated through application to experimental three-dimensional data.