[17p-S2_204-1~18] 23.1 Joint Session N "Informatics"

6:00 PM - 6:15 PM JST(9:00 AM - 9:15 AM UTC)

[17p-S2_204-17] A Study on an Accuracy Validation Method for Non-Rigid Registration between APT Data and STEM Tomography Data Using Atomic-Scale Simulated Datasets

〇(M1)Akito Mie¹, Taisei Bessho¹, Kazunori Iwamitsu¹, Yoshito Otake¹, Zentaro Akase¹, Shigetaka Tomiya¹ (1.naist)

Keywords:

3D-Atom probe tomography,Electron Beam Tomography,Accuracy verification

The purpose of this study is to establish a method for validating the accuracy of non-rigid registration between APT data and STEM tomography data. Because the true atomic positions are unknown in experimental data, a pair of simulated APT and STEM tomography datasets assuming known atomic positions was constructed. Non-rigid registration was then applied to the APT data after introducing known local distortions, and an accuracy validation methodology is discussed based on the results.