[17p-W8E_308-1~15] 11.5 Junction and circuit fabrication process, digital applications

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-W8E_308-12] Investigation and Optimization of Fluorination Process for Removing Superconducting Nb Surface Native Oxides

〇(M2)Yamato Aoyama¹, Daisuke Ohori¹, Yuichi Fujita², Yoshiro Urade², Go Fujii², Kunihiro Inomata², Kazuhiko Endo¹ (1.IFS, Tohoku Univ., 2.G-QuAT, AIST)

Keywords:

Niobium,fluorination,dry process