[17p-W9_323-1~10] CS.7 Code-sharing Session of 6.5 & 7.5

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[17p-W9_323-3] Evaluation of Organic Thin-Film Etching Behavior during Atomic Hydrogen Annealing Using Dual Quartz Crystal Oscillators

〇Akira Heya¹, Yuto Fujino¹, Koji Sumitomo¹ (1.Univ. of Hyogo)

Keywords:

atomic hydrogen,polymer film,quartz crystal microbalance

A simple method for measuring atomic hydrogen density using a dual quartz crystal microbalance was investigated. By simultaneously monitoring a quartz crystal coated with a polyglyceryl ether film and an uncoated quartz crystal, the influence of temperature fluctuations was compensated, enabling the extraction of the net frequency change during atomic hydrogen annealing (AHA). Rapid etching occurred in the initial stage of AHA treatment, whereas after 30 min the reactivity decreased due to the formation of a surface-modified layer, as indicated by the frequency changes and X-ray photoelectron spectroscopy spectra.