[17p-WL2_401-1~14] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)English Presentation

[17p-WL2_401-13] Fabrication of ITO TFTsfor driving thermo-optic phase shifters on Si photonics platform

〇(M2)YUANPIN WANG¹, Xuanhedong Gao¹, Okano Makoto², Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.UTokyo, 2.AIST)

Keywords:

Silicon Photonics,Oxide Semiconductor TFT