[17p-WL2_401-1~14] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[17p-WL2_401-3] Fabrication Error Analysis of Si Photonics Metastructure Grating Couplers

〇Naoki Tahara¹, Mikiya Kamata¹, Toshihiko Baba¹ (1.Yokohama Natl Univ)

Keywords:

Silicon photonics,Fiber coupler,Grating coupler

This study analyzed fabrication error sources in Si photonics metastructure grating couplers by reconstructing fabricated structures from SEM images an performing regression analysis. The results show that the gap between full-etched holes dominates fabrication errors rather than the hole size itself, due to proximity effects. Design strategies to compensate for fabrication errors are also being investigated.