[17p-WL2_401-1~14] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[17p-WL2_401-8] Highly Sensitive Optical Hydrogen Sensor Based on Pt-SiO₂/Si Microring Resonator with Al₂O₃ Upper Cladding Layer

〇hiroaki tasaki¹, ayumu sato¹, shinji okazaki¹, yoshiaki nishijima¹, taro arakawa¹ (1.Yokokoku Univ.)

Keywords:

gas sensor,optical,hydrogen

In this study, we investigated an optical hydrogen sensor based on a silicon microring resonator (MRR) with an Al₂O₃ upper cladding layer. Thermal simulations confirmed that the Al₂O₃ cladding enhances heat transfer to the MRR core, while experiments revealed that the conventional high-temperature calcination process degrades the MRR characteristics. To address this issue, a new sensing film formation process was proposed, in which Pt–SiO₂ is pre-calcined, pulverized, and fixed onto the device using a binder. Hydrogen exposure experiments demonstrated a clear exothermic response.