[18a-M_103-1~13] 8.1 Plasma production and diagnostics

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-M_103-10] Investigation of uncertainty in rotational and vibrational temperature diagnostics of nitrogen plasma generated by plasma-enhanced metal-organic chemical vapor deposition system

〇Yuya Yamashita¹, Tokio Takahashi¹, Tetsuji Shimizu¹, Hisashi Yamada¹ (1.AIST)

Keywords:

optical emission spectroscopy (OES),uncertainty,molecular spectrum

The objective of this study is to quantify the uncertainty of the cause of analysis in plasma diagnosis based on optical spectroscopic measurement. A quasi -atmospheric-pressure nitrogen plasma was employed as the diagnostic subject. Multiple analytical parameters—including wavelength range, transitions, species-specific temperatures, and wavelength axis fitting—were systematically varied to obtain rotational and vibrational temperatures along with their determination. The fitting of the wavelength axis increased the coefficient of determination. However, it was revealed that overfitting could occur.